Lub tshuab txiav plasma feem ntau suav nrog cov khoom hauv qab no:
High-frequency hwj chim qhov chaw: Siv los tsim ib tug high- zaus hluav taws xob teb;
Kev sib koom tes sib koom: Siv los kho qhov kev faib tawm ntawm qhov siab - zaus hluav taws xob nyob rau hauv lub plasma chamber;
Plasma Chamber: Siv los ionize roj molecules thiab tsim cov ntshav plasma;
Lub tshuab nqus tsev: Ua kom lub tshuab nqus tsev thiab ruaj khov ntawm cov plasma chamber;
Kev tswj qhov system: Siv los tswj cov plasma tsis thiab ua tiav kev tswj hwm ntawm plasma cov khoom hluav taws xob.
